The study of measurements, broadly known as metrology, is also of much industrial relevance with many companies having separate metrology departments to monitor the production and characterization of materials, devices, and components
Signals from both elastic and inelastic interactions can be spatially resolved or mapped, and such spatial intensity distributions form the basis of imaging methods
Energy is not expressed in the standard SI or MKS unit of joule (J), but in unit of electron volts (eV), which is the kinetic energy gained by an electron accelerated from rest through a potential difference of 1 V
Diffraction studies of surfaces require electrons with energies of the order of 100 eV, and such surface techniques are termed low energy electron diffraction (LEED) or microscopy (LEEM)
To probe the internal crystal structure of materials, electrons with substantially higher energy (100–200 keV), e.g. in TEMs, with wavelengths in the range (0.037–0.0251 Å) are used
A measure of how deep the electromagnetic radiation can penetrate a material; often, it is defined as the depth at which the intensity falls to 1/e (37%) of its original value
For any technique, if the probe and signal radiations are not the same and have different mean free path lengths in the material, the volume analyzed (or the sampling depth) will be determined by the radiation—either probe or signal—with the smaller mean free path length
Higher-energy probes, particularly X-ray radiation, have a uniform and predictable behavior in all materials. The absorption of X-rays, is defined by the attenuationcoefficient, μ, which increases with the average atomic number of the material and determines the depth of penetration
The intensities of γ-rays show the same exponential dependence on thickness as X-rays, but with their much higher energies (∼50 keV – 50 MeV) they penetrate much larger distances
For low energy (∼0–2000 eV) electrons, the mean free path length is of the order of a few Å, and curiously, for all materials, satisfy a universal curve as a function of energy
Neutrons have ∼1,000 times the mass of electrons but do not have an electric charge. As a result, neutrons penetrate much greater distances than electrons and X-ray photons
The interaction of high-energy ions with materials is also complex. At low (∼eV) energy they are reflected from the surface, following simple rules of conservation of energy and momentum. At higher energies, they interact with the material, causing atomic displacements, formation of clusters and sputtering (the removal of atoms, ions, and electrons from the specimen)
The resolution in a direction normal to the direction of incidence, depends on the diameter of the incident beam, its wavelength, and its mean free path length in the material
The precision of a measurement with respect to time, is a very important criterion for designing in situ and dynamic experiments for the study of growth, morphological evolution, and response of materials to various applied stimulus
For photons, the transfer of energy in the form of heat largely causes the damage. The degree and spatial extent of the damage will be determined by the penetration of the radiation in the material, and the energy and flux of the incident photon
Electrons can cause significant damage by breaking interatomic bonds, particularly in polymeric materials. However, if the electrons are accelerated through higher voltages (∼1 MeV), such as in high-voltage electron microscopes (HVEMs), the momentum transferred to the atomic nuclei by elastic large-angle scattering is sufficient to cause significant atomic displacements even in inorganic materials and alloys
Spectroscopy: Absorption, Emission, and Transition Processes
1. Primary electron (probe) with sufficient energy, EP, to overcome the binding energy, EB, of the inner-shell electron, ejects the core electron
2. The primary electron is scattered in some new direction with reduced energy, EP'
3. The core electron that is removed is now free and is referred to as the secondaryelectron
4. The energy lost by the primary electron, EP - EP′ = EB + ES, is sensitive to the binding energy of the core electron, and by measuring this loss of energy accurately, the electronic structure of the atom/material can be probed
5. It is also possible to map the distribution of such secondary electrons as the primary electron beam is rastered along the specimen surface, and this technique forms the basis of SEM
6. Alternatively, instead of the primary electron if a photon of sufficient energy, EP = hf , is incident, the related process of photoionization occurs